MPCVD 机器与系统
SDACME supplies project-configured microwave plasma chemical vapor deposition systems for diamond growth and process-development projects, and can evaluate system configurations for selected advanced diamond-material applications.
我们现有的公共2.45GHz MPCVD范围包括： 6kW、10kW 和 15kW 系统 for different research, loading, production-development and capacity-expansion requirements.
A complete MPCVD project involves more than microwave power alone. Reactor design, substrate or seed arrangement, vacuum control, gas delivery, cooling, process monitoring, site utilities and the required supply scope all influence the final system configuration.
Use this page to compare available MPCVD systems, understand the main engineering modules and applications, review selection factors, and prepare the information required for a technical recommendation.
将 MPCVD 系统配置在应用周围，而不仅仅是功率等级
SDACME supplies 2.45GHz MPCVD systems in 6kW, 10kW and 15kW configurations for diamond-growth and diamond-material projects.
The appropriate system depends on what you plan to grow or deposit, the substrate or seed size, expected loading, project stage, site utilities, operating experience and future capacity plan.
我们的项目范围可以协调 MPCVD 的主要子系统，其中包括：
微波的产生与传播
Microwave generation, transmission and applicable operating-condition monitoring.
反应室与舞台
Reaction chamber and substrate-stage configuration coordinated around the required process.
V流量控制和压力控制
Vacuum preparation and operating-pressure control according to the selected machine configuration.
天然气配送与MFC
配置了工艺气体输送和质量流量控制通道。.
冷却
Cooling requirements coordinated around the chamber, microwave equipment and selected project scope.
监控
温度和适用于机器的操作条件监测。.
PLC/HMI控制
Centralized parameter setting, machine status, alarms and applicable operating functions.
安全监控与安全锁
Configured monitoring and interlock functions according to machine and project requirements.
FAT, installation coordination, commissioning support, training and technical documentation can also be included according to the agreed project scope.
M02 · MPCVD 机器是什么？完整化的微波等离子体 CVD 系统不仅仅是微波发生器
An MPCVD machine uses microwave energy to generate and sustain plasma inside a controlled reaction environment for chemical vapor deposition.
A complete MPCVD system typically integrates the microwave source and transmission components with the reaction chamber, vacuum system, process-gas delivery, pressure control, substrate-temperature monitoring, cooling, PLC/HMI control and system-protection functions.
MPCVD 系统通常用于以下应用：
实验室培育的钻石
钻石生长研究、开发和生产方面的项目。.
单晶钻石
单晶生长及其相关材料开发。.
多晶型钻石
在特定基材区域上的钻石膜生长情况。.
工业用钻石材料
针对特定项目的工业用钻石材料开发。.
与半导体相关的钻石
与半导体应用相关的选定钻石材料项目。.
热致变性/光学致变性/掺杂钻石
选定的先进钻石材料开发项目。.
The final system and process configuration should be reviewed against the required material result rather than selected from rated microwave power alone.
比较6kW、10kW和15kW MPCVD系统
三种 2.45GHz 平台，满足不同项目的需求。.
The 6kW, 10kW and 15kW systems belong to the current SDACME public MPCVD range, but they are not simply three versions of the same machine with different microwave ratings.
Chamber configuration, usable process area, substrate-stage arrangement, loading requirements, cooling demand and the intended research or production role should all be considered.
ACME-2060
典型搭配
- 大学和科研实验室
- 工艺开发
- 更低的装载要求
- 支持或增加研究能力
- 更紧凑的系统被优先考虑的项目
关键参考资料：
2.45GHz platform with a rated 6kW microwave configuration
for research and smaller-scale engineering requirements.
ACME-MW1070升级版
典型搭配
- 生产开发项目
- 不断壮大的团队正在超越基本的实验室研究
- 需要更高载荷能力的客户
- 需要平衡配置的新生产项目
- 现有用户计划扩容
关键参考资料：
2.45GHz platform with rated 10kW microwave output
and current mainstream SDACME positioning.
ACME-2150
典型搭配
- 更高的装载要求
- 以生产为导向的项目
- 产能扩建项目
- 需要更大使用空间的分阶段配置的应用
- 客户对更大加工空间和装载空间的需求不断增加
关键参考资料：
2.45GHz platform with a rated 15kW microwave configuration,
higher microwave power and greater loading headroom.
如何选择MPCVD系统
更高的微波功率并不一定意味着更好。.
1. 你想种植或投资什么？
Requirements can differ between gem-diamond growth, single-crystal material development, diamond films and semiconductor-related diamond research.
2. 将使用哪种种子或基质尺寸？
Seed dimensions, substrate geometry and required usable deposition area influence the stage and plasma configuration.
3. 一次运行需要多少个基质？
Loading should be evaluated together with spacing, thermal distribution and process conditions.
4. 项目处于什么阶段？
Research, pilot development, production development and expansion projects can prioritize different machine characteristics.
5. 有哪些实用程序可用？
Electrical power, cooling, process gases, compressed air, exhaust and installation conditions should be reviewed before final configuration.
6. 未来扩建计划是什么？
If additional reactors may be installed later, facility layout, utility capacity and process standardization should be considered from the first installation.
MPCVD系统的核心模块
该反应堆只是整个工艺平台的一部分。.
微波源与传输
Provides adjustable microwave energy to the reactor and supports applicable microwave operating-condition monitoring.
反应室与舞台
Creates the controlled deposition environment and supports the required seed or substrate arrangement.
V流量控制和压力控制
Establishes the required chamber condition and regulates pressure during operation.
天然气配送与MFC
Controls process-gas delivery through configured mass-flow-control channels.
温度监测
Provides substrate-temperature information for process setup and operating review.
冷却系统
Supports thermal management of the chamber, microwave equipment and temperature-sensitive components.
PLC 和 HMI 控制
Coordinates parameter setting, machine status, alarms and applicable operating functions.
安全与锁止装置
Configured monitoring and interlocks can support protective responses during machine operation.
MPCVD供应范围完整
在比较MPCVD报价之前，先确定供求边界。.
这个短语 “完整MPCVD系统” can mean different things to different suppliers. For a meaningful commercial comparison, responsibilities for equipment, auxiliary systems, utilities, installation and local site work should be defined clearly.
主要MPCVD设备范围
- MPCVD主机
- 微波子系统
- 反应室和舞台
- V脉冲和压力控制
- 工艺气体控制
- 温度监测
- PLC/HMI控制
- 配置的保护功能
项目配置/可选范围
- 气体柜
- 工艺气体管道
- 匹配的冷却设备
- 冷却水管道
- FAT/远程旁白
- 安装协调
- 调试支持
- 面向行动的培训/过程导向的培训
网站/本地责任
- 土木工程与基础工程
- 主电力分配系统
- 本地电气连接
- 天然气储藏
- 消防安全要求
- 排气管
- 当地许可证和合规性
- 当地承包商和现场工人
MPCVD 应用程序
实验室培育的钻石
MPCVD systems can be evaluated for research, pilot, production-development and expansion projects involving lab-grown diamond.
System selection depends on seed size, loading, process objectives, utility conditions, operating experience and future production plans.
Equipment specifications support the process environment, but final diamond color, clarity, growth rate, yield and commercial output are influenced by the complete growth process and are not determined by microwave power alone.
单晶钻石
MPCVD is widely used as a process platform for single-crystal diamond growth and related material-development work.
System evaluation should consider seed geometry, target growth area, plasma condition, temperature distribution, material specification and required process flexibility.
多晶型钻石薄膜
MPCVD can also be applied to polycrystalline diamond-film growth where the project requires controlled plasma conditions over an appropriate substrate area.
Important engineering inputs include substrate geometry, film thickness, deposition area, thermal management and the required material characteristics.
半导体和热管理钻石
Diamond materials are being evaluated for semiconductor, heat-spreading and thermal-management applications because these projects can require specialized material properties beyond conventional gem-diamond production.
For these applications, the MPCVD system should be evaluated around the material specification, substrate interface, film or crystal requirement, purity objective, usable area and downstream integration process.
其他先进的钻石材料项目
针对项目配置的 MPCVD 系统还可以进行评估：
- 工业用钻石；;
- 光学钻石；;
- 掺杂的钻石；;
- 人工结晶钻石研究；;
- 其他微波等离子体辅助钻石材料开发。.
These applications should be reviewed individually because substrate, purity, thickness, doping, uniformity and process requirements can differ substantially.
支持工艺开发和系统运行的工程特性
Available monitoring, control and subsystem functions vary according to the selected model and project configuration.
可调节的微波功率
Allows operating power to be adjusted according to the process and selected machine configuration.
PLC 和触摸屏操作
Centralizes parameter setting, machine-status monitoring, alarms and operating information.
多通道气体控制
Configured MFC channels support controlled delivery of required process gases.
V压缩空气和压力管理
Provides the controlled chamber-pressure environment required for MPCVD process development.
温度监测
Provides operating feedback on substrate temperature during the process cycle.
水冷系统设计
Supports thermal management of the reaction chamber and other temperature-sensitive system components.
微波操作状态监测
支持对适用的微波操作条件进行观察。.
可配置的安全功能
Monitoring and interlocks can be configured around cooling, vacuum, temperature, electrical and emergency conditions.
基于项目的系统集成
Coordinates the reactor, microwave, gas, vacuum, cooling and control systems around project requirements.
FAT 和国际项目支持
FAT, remote witnessing, export delivery, installation coordination and training can be planned as part of the project scope.
ACME-MW1070升级版
The current ACME-MW1070 upgraded configuration is positioned as SDACME’s mainstream 2.45GHz MPCVD system for production-development projects.
It is intended for customers who require a step beyond smaller research platforms while maintaining a project-configured approach to chamber, loading, utilities, auxiliary systems and process objectives.
Detailed chamber, stage, vacuum, loading, utility and process references are provided on the dedicated 10kW page rather than repeated in full on this product-line Hub.
MPCVD 操作期间的控制、监测和保护
MPCVD process cycles can require extended operating periods, so system operation depends not only on the plasma but also on utilities, monitoring, cooling and maintenance.
配置的控制和监测可以包括：
工艺压力
适用于过程压力监测和控制。.
气流
通过选定的MFC通道配置气体流量控制。.
温度
运行和工艺审核中的温度监测。.
冷却条件
配置了冷却水运行状况监控功能。.
微波状态
监测适用的微波操作条件。.
Vacuum状态
V根据机器配置进行自动状态监测。.
电气故障监测
适用于电力故障和运行状态监测。.
紧急停止
Emergency operating functions integrated according to machine configuration.
HMI报警
通过 HMI 显示报警和运行状态信息。.
从申请审核到系统运行
申请审核
Confirm the material, seed or substrate, expected loading, project stage and required result.
网站和实用工具的审查
Confirm electrical supply, cooling, gases, compressed air, exhaust, facility conditions and installation location.
工程建议
Evaluate the appropriate MPCVD model and required project configuration.
技术和商业确认
Define specifications, options, responsibilities, commercial terms, delivery requirements and service scope.
生产与系统集成
Manufacture, assemble, integrate and inspect the configured equipment.
工厂验收测试
Perform the agreed system checks and arrange remote witnessing when required.
装运、安装和调试
Prepare export packing and logistics, followed by agreed installation and startup support.
培训和售后支持
Provide agreed operation, maintenance and process-oriented training, followed by warranty and technical-support contact.
泰国 10kW MPCVD 项目
A 10kW MPCVD system was delivered to a customer project in Thailand and subsequently installed and put into operation.
SDACME managed the international customer interface, project coordination, delivery, warranty and after-sales communication, while manufacturing and engineering resources supported equipment production and applicable engineering execution.
客户身份和详细的流程结果将保持保密。.
This project reference is used to demonstrate confirmed project delivery and operating status rather than unverified claims about production output, diamond color, clarity or yield.
FAT 软件安装、培训和保修支持
在货物运输之前和之后降低项目风险。.
工厂验收测试
An agreed FAT checklist can be prepared for the configured MPCVD system. Remote video witnessing can be arranged according to project requirements.
安装与调试
Installation coordination, startup and commissioning support can be included according to the agreed project scope.
操作与培训
Training can include machine operation, safety procedures, startup, shutdown, routine maintenance and agreed process-oriented guidance.
保修与文档
Warranty scope, covered components, exclusions, service responsibilities and applicable documentation are confirmed for the selected project.
MPCVD 建议所需的信息
一个有用的报价需要超过功率规格的考虑。.
应用
您计划种植或投入哪些材料？
项目阶段
Research, pilot, production development, expansion or replacement?
种子/基质
Material, dimensions, quantity per run and required process area.
目标结果
Crystal growth, film thickness, purity, usable area or another project objective.
首选系统
6kW、10kW、15kW 或 “需要建议”。.
Vacuum / 压力
任何已知的压力或真空系统要求。.
加工气体
Required gases, available supply and any special MFC requirements.
电力供应
Local voltage, frequency, phase and available electrical capacity.
冷却
Available cooling conditions and whether matched cooling equipment is required.
控制/数据
Any special control, monitoring or data-interface requirements.
供应范围
Machine only or machine plus auxiliaries, FAT, installation, commissioning and training.
地点/时间安排
Installation country, project quantity and expected timing.
常见问题解答
MPCVD 机器是什么？
SDACME目前提供哪些MPCVD系统？
我应该选择哪种 MPCVD 电源？
MPCVD系统能否培育出实验室培育的钻石？
MPCVD是否适用于单晶和多晶钻石？
2.45GHz 和 915MHz MPCVD 的区别是什么？
完整的 MPCVD 系统包含哪些内容？
MPCVD机器需要哪些辅助设备？
MPCVD机器的成本是多少？
什么因素会影响MPCVD钻石的生长速度？
MPCVD报价需要提供哪些信息？
SDACME能提供FAT安装和培训吗？
为何选择与 SDACME 合作开展 MPCVD 项目？
One international project interface from requirement review to delivery and after-sales communication.
SDACME充当了 MPCVD 机器与系统供应商及系统集成合作伙伴 适用于国际项目。.
SDACME国际项目界面
- 需求收集
- 初步模型选择
- 项目协调
- 商业传播
- 合同协调
- 出口交付
- 保修接口
- 售后沟通
工程与制造资源
- 详细的工程设计
- 设备制造
- 大会
- 系统集成
- FAT
- 安装
- 调试
- 技术培训
This approach gives international customers a defined commercial and after-sales interface while maintaining access to engineering and manufacturing resources required for the project.
提交您的 MPCVD 项目需求
Start with the application — you do not need to select the final power level yourself.
材料/应用
您打算种植什么或存入什么？
种子/基质
运行尺寸和预计数量。.
项目阶段
研究、试点、生产开发或扩张。.
目标结果
材料、电影、水晶或生产开发目标。.
网站实用工具
供电、冷却条件和工艺气体。.
项目范围
安装国家、设备范围和预计时间表。.
If you are not sure whether 6kW, 10kW or 15kW is appropriate, simply tell us that you 需要推荐.
