MPCVD Machines & Systems for Diamond Growth
Configure a 6kW, 10kW or 15kW microwave plasma CVD system for lab-grown diamond, industrial diamond and advanced-material projects.
Project-configured integration of the reaction chamber, microwave source, vacuum system, gas delivery, cooling, PLC/HMI control and safety functions.
- 2.45GHz MPCVD configurations available in 6kW, 10kW and 15kW.
- Reactor, microwave, vacuum, gas delivery, cooling and control systems configured around project requirements.
- FAT, installation coordination, operator training and technical support available according to project scope.
High Power
6kW / 10kW / 15kW
Stable & Uniform
Temperature Field
Reliable & Safe
Industrial Design
What Is an MPCVD Machine?
An MPCVD machine uses microwave energy to generate and sustain plasma inside a controlled reaction chamber for chemical vapor deposition.
A complete MPCVD system integrates the microwave source, reaction chamber, vacuum system, gas delivery and mass-flow control, process monitoring, water-cooling, PLC/HMI control and safety functions into one coordinated platform.
A microwave generator is one subsystem of an MPCVD machine. Diamond growth also requires the reaction, vacuum, gas-delivery, cooling, monitoring, control and safety systems to operate together.
Integrated MPCVD System
Core subsystems coordinated around the selected project configuration.
- Vacuum
- Gas Control
- Plasma
- Deposition
- Monitoring
Applications
MPCVD systems can be configured for different diamond growth and advanced material applications.

Gem-Grade
Diamond
High-quality diamond growth for jewelry, research and controlled crystal development.

Industrial
Diamond
Diamond materials for cutting tools, thermal management and advanced industrial applications.

Research /
Diamond Film
Thin-film development, semiconductor research and advanced materials studies.
Need Help Selecting an MPCVD System?
Send your application, seed or substrate size, expected loading, project stage and site conditions. Our team will use this information to review whether a 6kW, 10kW or 15kW starting configuration is more appropriate for your project.
- Application
- Seed / Substrate Size
- Expected Loading
- Site Utilities
- Required Supply Scope
Start with your project requirements
Select 6kW, 10kW, 15kW or choose “Need Recommendation.”
Submit MPCVD Project RequirementsModel Comparison
| Model | MPCVD-6K | MPCVD-10K | MPCVD-15K |
|---|---|---|---|
| Microwave Power (Max.) | 6 kW | 10 kW | 15 kW |
| Operating Frequency | 2.45 GHz (±50 MHz) | 2.45 GHz (±50 MHz) | 2.45 GHz (±50 MHz) |
| Chamber Diameter | Φ900 mm | Φ950 mm | Φ950 mm |
| Substrate Size (Max.) | Φ150 mm / 6 inch | Φ200 mm / 8 inch | Φ250 mm / 10 inch |
| Typical Growth Temperature | 700 – 1200 ℃ | 700 – 1200 ℃ | 700 – 1200 ℃ |
| Vacuum Level (Base) | ≤ 1 × 10⁻⁵ Pa | ≤ 1 × 10⁻⁵ Pa | ≤ 1 × 10⁻⁵ Pa |
| Gas Channels | 8 Channels | 10 Channels | 12 Channels |
| Cooling Method | Water Cooling | Water Cooling | Water Cooling |
| Power Supply | 3Φ 380–440VAC 50/60 Hz | 3Φ 380–440VAC 50/60 Hz | 3Φ 380–440VAC 50/60 Hz |
| System Footprint (W×D×H) | ≈ 2.5 × 1.8 × 2.3 m | ≈ 2.8 × 2.0 × 2.4 m | ≈ 2.8 × 2.2 × 2.5 m |
* Specifications are subject to change without notice.
System Composition
Microwave Source
Stable microwave power source for plasma generation.
Reaction Chamber
Optimized chamber design for stable plasma and temperature control.
Vacuum System
High vacuum pumping system for clean and stable process conditions.
Gas Delivery System
MFC controlled multi-gas delivery for repeatable processes.
Cooling System
Closed-loop cooling system for precise temperature control.
PLC / HMI Control
Industrial control system with monitoring and data logging.
Safety Interlock
Multi-level protection with safety monitoring functions.
Standard Configuration
- MPCVD Main Chamber
- Microwave Power Supply
- Vacuum System
- Gas Delivery System (MFC)
- Water Cooling System
Optional Items
- Hot Filament Assistance System
- In-situ Optical Pyrometer
- Automatic Pressure Control (APC)
- Data Logging Interface
- Customized Chamber & Fixture
Customer-Prepared Conditions
- Power Supply: 3Φ 380–440VAC
- Compressed Air: 0.6–0.8 MPa
- Cooling Water Supply
- Exhaust / Scrubber (If Required)
- Installation Space & Foundation


Process / Site Requirements
Ambient Temperature
15 – 30 ℃
Relative Humidity
≤ 70%
Non-condensing
Floor Loading
≥ 600 kg/m²
Cleanliness
Class 100,000
or better
Installation Space
Refer to layout
drawing
Utility Connections
Power, Water,
Gas, Air, Exhaust
Video & Image Evidence








FAT, Installation, Training & Support
Factory Acceptance Test (FAT)
Full system testing and performance verification before shipment.
Installation & Commissioning
On-site installation and commissioning support by experienced engineers.
Operator Training
Training for operation, maintenance, safety and daily procedures.
After-Sales Support
Remote technical support, troubleshooting guidance and spare parts supply.
FAQ
Is this quotation for one MPCVD machine or a complete production line?
The base quotation should state the MPCVD system scope clearly. Seed material, cleanroom planning, cutting/polishing equipment, external utilities, installation and process support are confirmed separately according to the project.
Which model should I choose: 6kW, 10kW or 15kW?
The decision depends on the application, seed or substrate size, process area, required operating window, site power and project objective. Send these details for an engineering recommendation.
Are diamond seeds included?
Seeds or starter samples can be discussed as a project option. Their size, grade, quantity and intended application must be confirmed before quotation
What process gases are required?
MPCVD diamond processes commonly use hydrogen and methane, with oxygen, nitrogen or other gases configured according to the process. Gas type, range, purity and local supply are confirmed for the final system.
Can the system run on solar power?
The machine requires a stable three-phase AC supply with adequate capacity. Solar power can only be considered through a properly engineered grid, inverter and storage solution that maintains the required power quality.
Do you provide installation and training?
Installation guidance, on-site commissioning, operator training, process support and remote service can be included according to the final project scope.
Can I inspect the machine before shipment?
Factory testing, video inspection, remote acceptance and sample testing can be arranged when included in the technical proposal and acceptance plan.



