10KW MPCVD machine
The 10kW microwave plasma equipment generates stable, high-energy plasma with precise power control and high efficiency. It is ideal for materials processing, surface treatment, gas decomposition, and scientific research, offering reliable continuous operation with advanced protection and monitoring features.
Product Description
| Jinan ACME MW1070 MPCVD Machine | ||
| Vacuum | Vacuum measurement | Piezoresistive gauge 0.1-100kpa Capacitance gauge 0-1000Pa |
| Operating pressure range | 4-28Kpa | |
| Vacuum leakage rate | ≤ 5 * 10-9Pa.M3/S (He leak detection) | |
| Pressure control | Auto-Control | |
| Cavity material | Aluminum alloy excitation chamber, quartz vacuum chamber | |
| Observation window | Temperature measuring hole with diameter of 10mm and observation window of porous hole | |
| Cooling mode | Cooling mode | Water cooling+chamber air cooling |
| Sample table size | Molybdenum stage Φ 70mm, uniform area Φ 50mm | |
| Temperature measurement | Infrared thermometer, range 300-1400 ℃ | |
| Cooling water flow | >50L/min | |
| Cooling water temperature | 20-22℃ | |
| Cooling water interface | 1-inch outer wire interface | |
| Operating system | Operating system | PLC control, 15 inch touch screen control |
| Process Menu | 10 process menus, 25 lines for each | |
| Microwave and power supply | Microwave frequency | 2.45±0.1GHz |
| Output power | 1.5-7.5Kw (equipped with 10kw domestic microwave power supply) | |
| Input power electricity | 380 Ac/50Hz, three-phase five wire (3 * 10+2 * 6 power line),>15Kw | |
| Microwave leakage rate | Microwave leakage rate 5cm away from the equipment ≤ 5Mw/cm2 | |
| Process gas | Flowmeter and interface | H2 (1000SCCM) CH4 (50SCCM) N2 (10SCCM) O2 (10SCCM) 1/4 “VCR female compressed air 8mm Pu tube quick plug |
| The flowmeter can change the type of gas used through software | ||
| Air supply pressure | 0.3-0.35MPa | |
| Compressed air pressure | 0.5-0.6MPa | |
| Vacuum pump | Rotary vane vacuum pump | Oil pump |
| Pumping speed | 4L/S | |
| Power supply | Ac 380V(±10%) | |
| Interface | Air extraction KF25, air exhaust KF25 | |
| Operating environment | Ambient temperature and humidity | The room temperature is lower than 26 ℃ and the humidity is lower than 40% |
| Overall dimensions of equipment | Size | 1250(L)×800(W)×2100(H)mm |
| Equipment appearance | ||
| Equipment acceptance conditions: | 1. Equipment installation: After the equipment installation is completed, Party A and Party B shall conduct on-site commissioning, and Party B’s technicians shall conduct equipment operation, safety and maintenance training for the person in charge of Party A. | |
| 2. System test: The system can be started and operated normally, and the detached fireball is stable without jumping. | ||
| 3. Microwave leakage: the microwave leakage is less than 5mW/cm2 (the output power of the microwave source is more than 80%, 10cm away from the equipment) | ||
