Industrial Microwave Generators for Plasma, CVD and Heating Systems

2450MHz magnetron microwave generators from 6kW to 15kW, with adjustable output, RS485 control, water cooling and project-based integration support.

 

Product Selection

6kW Microwave Generator

Frequency: 2450MHz Output Power: 6 ± 1kW Interface: RS485 Modbus RTU Cooling: Water Cooling Applications: Plasma, CVD, Heating

10kW Microwave Generator

Frequency: 2450MHz Output Power: 10 ± 1kW Interface: RS485 Modbus RTU Cooling: Water Cooling Applications: Plasma, CVD, Heating

15kW Microwave Generator

Frequency: 2450MHz Output Power: 15 ± 1kW Interface: RS485 Modbus RTU Cooling: Water Cooling Applications: Plasma, CVD, Heating

25kW Microwave Generator

Frequency: 915MHz Output Power: 15 ± 2kW Interface: RS485 Modbus RTU Cooling: Water Cooling Applications: Large Volume Heating, Material Processing

75kW Microwave Generator

Frequency: 915MHz Output Power: 75 ± 3kW Interface: RS485 Modbus RTU Cooling: Water Cooling Applications: Large Volume Heating, Industrial Processing

100kW Microwave Generator

Frequency: 915MHz Output Power: 100 ± 5kW Interface: RS485 Modbus RTU Cooling: Water Cooling Applications: Large Volume Heating, Industrial Processing

2450MHz vs
915MHz

2450MHz — Standard Range: 6kW–15kW
  • More compact microwave generator and system design
  • Suitable for plasma, CVD and precision material processing
  • Commonly used in laboratory and small-to-medium industrial systems
  • Well suited for coupling with plasma generators and process chambers
  • Available SDACME power range: 6kW, 10kW and 15kW
915MHz — High-Power Range: 25kW–100kW
  • Better suited for larger loads and high-power industrial systems
  • Suitable for bulk heating, drying and large-volume material processing
  • Provides greater penetration depth for certain materials and processes
  • Requires a larger waveguide, applicator and cooling configuration
  • Available SDACME power range: 25kW, 75kW and 100kW

Typical
Applications

Microwave
Plasma Systems

MPCVD and
CVD Equipment

Industrial
Heating

Material Drying
and Processing

Laboratory
Microwave Systems

OEM Equipment
Integration

Replacement of Existing
Microwave Sources

Typical System Components

  • Microwave Generator
  • Isolator or Circulator
  • Directional Coupler
  • Water Load / Dummy Load
  • Waveguide Components
  • Manual or Automatic Tuning Unit
  • Control and Interlocking Cables
  • System Drawings and User Manual

The actual component combination depends on the microwave frequency, power level, process chamber, load characteristics and project integration requirements.

Optional or Project-Based Components

  • Antenna or Horn Assembly for 915MHz Systems
  • Automatic Matching or Tuning System
  • Directional Coupler and Power Monitoring
  • PLC or Touchscreen Integration
  • Custom Waveguide Assemblies
  • Cabinet or Rack Integration
  • Remote Monitoring and Ethernet Communication
  • Special Connectors or Mechanical Adapters
  • External Water Chiller

Optional items are selected according to the application, selected generator model, existing equipment and required level of system integration.

Customer-Supplied Conditions

  • Input Power Supply
    Required voltage, frequency, phase and available electrical capacity must match the selected microwave generator.
  • External Cooling Water Supply
    Suitable water temperature, flow, pressure and water quality must be provided unless a water chiller is included.
  • Process Chamber or Applicator
    Reactor, process chamber, applicator or load information is required before confirming the waveguide and matching design.
  • External PLC or Control System
    Where system-level control is required, the customer should provide the communication protocol, I/O list and control logic.
  • Installation Space and Ventilation
    Adequate clearance, ventilation, grounding and maintenance access must be available at the installation site.
  • Safety and Interlocking Conditions
    Door interlocks, emergency-stop circuits and other external safety logic must be coordinated with the complete system.

Customer-supplied items may vary by project. All interfaces and site conditions should be reviewed before the final configuration and quotation are confirmed.

Control and Data Functions

7" or 10" HMI / Touchscreen Control
Output Power Monitoring
RS485 Communication
Reflected Power Monitoring
Modbus RTU Protocol
Water Flow Monitoring
Adjustable Output Power
Water Temperature Monitoring
Fault Logging and History

Safety and Protection

Arc Detection
Protection
External Interlock
Interface
Anode Overvoltage
and Overcurrent
Power Supply
Overtemperature
Water Flow
Protection
Water Temperature
Protection
Fault Locking
and Alarm
Emergency Stop
Interface

Available control, monitoring and protection functions may vary according to the microwave generator model and final project configuration.

Cooling Requirements

SDACME industrial microwave generators use external water cooling to maintain stable operation and protect critical power and microwave components.

  • Recommended inlet water temperature: 15–35°C
  • Reference water flow: See the model table
  • Recommended water pressure: 0.2–0.4 MPa
  • Water quality: Clean, low-conductivity and non-corrosive water
  • Prevent scale, sediment and particles from entering the cooling circuit
  • Separate cooling circuits may be required for the power supply, microwave head, circulator and water load
ModelRated PowerReference Minimum
Water Flow
6kW6kW≥ 8 L/min
10kW10kW≥ 12 L/min
15kW15kW≥ 16 L/min
25kW25kW≥ 25 L/min
75kW75kW≥ 60 L/min
100kW100kW≥ 80 L/min

The values above are reference figures for preliminary system planning. Final water flow, pressure, cooling-circuit design and chiller capacity must be confirmed according to the selected model, component combination, ambient conditions and operating load.

Replacement and OEM Integration Support

1

Provide Existing
Model Information

Send the current brand, model, nameplate, photos and available drawings.

2

Confirm Frequency
and Output Power

Confirm 2450MHz or 915MHz, rated power and operating mode.

3

Confirm Input Power
and Voltage

Provide input voltage, frequency, phase and available electrical capacity.

4

Confirm Interface and
Control System

Review waveguide, mechanical interface, RS485, Modbus and I/O requirements.

5

Confirm Cooling
Method

Confirm cooling water, chiller capacity, flow, temperature and pressure.

6

Integration, System
Check and Test

Confirm the technical solution, complete integration and perform functional testing.

After reviewing the existing equipment and project requirements, SDACME will provide a compatible replacement recommendation or customized OEM integration proposal. Final compatibility must be confirmed through technical evaluation.

Real Testing and Operation

6kW Generator Running Test

Stable operation with external watercooling.

10kW Generator Performance Test

CVD system application and outputverification.

15kW Generator Long-Term Test

Continuous-output testing and operating stability.

25kW High-Power Test

915MHz test for large-volume heating applications.

75kW High-Power System Test

Industrial processing-line operation and testing.

100kW High-Power Operation

Continuous long-duration industrial operation test.

FAQ

The correct power level depends on your application, load or reactor, required processing area, operating mode, microwave interface and site conditions.

Our 2450MHz range includes 6kW, 10kW and 15kW models. Higher-power 915MHz configurations, including 25kW, 75kW and 100kW, are evaluated according to the specific industrial system.

We can provide a preliminary quotation based on the requested power. However, the final configuration should be confirmed after reviewing the application, reactor or load, waveguide interface, control requirements and cooling conditions.

Microwave power alone cannot be used to guarantee processing speed, temperature, production capacity, diamond growth rate or other process results.

2450MHz microwave generators are generally used for more compact plasma, CVD, MPCVD, laboratory and medium-power industrial systems. SDACME’s 2450MHz range mainly includes 6kW, 10kW and 15kW models with BJ26 microwave output.

915MHz is normally selected for higher-power systems and larger industrial loads. SDACME can evaluate 25kW, 75kW and 100kW configurations according to the project. The 75kW system, for example, uses a BJ9 microwave output and requires substantially higher cooling capacity than the smaller 2450MHz models.

The two frequencies are not directly interchangeable. Selection must be based on the required power, load dimensions, reactor or applicator design and process requirements.

A typical microwave generator system may include:

  • High-frequency microwave power supply
  • Microwave head
  • Magnetron
  • Excitation cavity
  • Local control system
  • RS485 communication interface
  • Connecting cables
  • Microwave circulator or isolator
  • Reflected-power load or water load

Depending on the project, waveguides, three-stub tuners, reflected-power monitoring, customized control interfaces, cooling equipment and installation accessories may be supplied as optional components.

The external electrical supply, cooling water or chiller, reactor, applicator, installation space and site utilities are normally confirmed separately. The exact standard configuration, optional items and customer-supplied items will be listed in the final quotation and technical agreement.

Yes. SDACME can evaluate replacement projects, but direct drop-in compatibility cannot be confirmed from the power rating alone.

For technical evaluation, please provide:

  • Existing brand and model
  • Equipment nameplate
  • Microwave frequency and output power
  • Input voltage and frequency
  • Waveguide type and dimensions
  • Installation dimensions
  • Cooling method
  • Control signals
  • Communication protocol
  • Reflected-power requirements
  • Electrical drawings
  • Photos of the existing microwave source and system

Adapter components, wiring changes, control modifications or mechanical modifications may be required. Final compatibility will be confirmed after engineering review.

The confirmed 6kW, 10kW and 15kW microwave generators support local touchscreen control and remote RS485 communication.

Depending on the selected model, the control system can provide:

  • Microwave preheating and start/stop control
  • Output-power setting
  • Output-power monitoring
  • Reflected-power monitoring
  • Anode voltage and current monitoring
  • Water-flow and temperature monitoring
  • Operating-status feedback
  • Fault and alarm feedback
  • Historical data and fault-record storage
  • USB data export on applicable models

Standard Modbus RTU communication is available on confirmed models, including the 10kW and 15kW systems. The final communication protocol, register list, commands and feedback signals will be confirmed for each project.

External water cooling is required for magnetron microwave generators. The required flow rate, water temperature, pressure and number of cooling circuits depend on the model and system configuration.

For reference:

  • The 6kW generator module requires a cooling-water flow of at least 8L/min, with an inlet-water temperature of 0–40°C.
  • The 10kW generator module requires at least 8L/min, with an inlet-water temperature of 0–40°C.
  • The 15kW system uses separate cooling circuits. The microwave power supply requires at least 8L/min, while the microwave head/circulator and water-load circuits each require at least 15L/min. The specified inlet-water temperature is 0–35°C.
  • The 75kW system requires separate cooling for the power cabinet, microwave head and water load. Its specified flow requirements are at least 25L/min, 35L/min and 100L/min respectively, with water temperature of 10–30°C and pressure of 0.4–0.6MPa.

Cooling requirements for 25kW and 100kW systems will be confirmed according to the final configuration. Unless the quotation specifically includes a chiller, the external cooling system is normally prepared by the customer.

Protection functions vary by model and project configuration. Confirmed functions may include:

  • Reflected-power protection
  • Filament undercurrent and overcurrent protection
  • Anode overvoltage and overcurrent protection
  • Magnetron overtemperature protection
  • Power-supply overtemperature protection
  • Arc or ignition protection
  • Waveguide arc protection on applicable models
  • Water-flow protection
  • Water-temperature protection
  • Magnetic-field overcurrent protection on applicable models
  • Fault-code display and fault-record storage
  • Remote alarm feedback

When the reflected power or another protected parameter exceeds the configured limit, the system may automatically stop the microwave output and report the fault. The exact protection logic and shutdown action will be confirmed in the technical agreement.

For an initial quotation, please provide at least:

  • Application
  • Required microwave power
  • Required frequency, if known
  • Quantity
  • Destination country

For a confirmed technical proposal, we may also need:

  • Load, reactor or applicator information
  • Input voltage and frequency
  • Continuous or other operating requirements
  • Waveguide or microwave output interface
  • Local and remote control requirements
  • Communication protocol
  • Cooling-water or chiller conditions
  • Installation dimensions
  • Required scope of supply
  • Project schedule

For replacement projects, please also provide the existing brand and model, nameplate, fault description, interface drawings and system photos. When important technical information is missing, SDACME can provide only a preliminary reference configuration rather than a final confirmed proposal.

Technical Inquiry & Request Form
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