DM400 Glove Box Evaporation System

DM400 Glove Box Evaporation Coating System

Equipment Overview:

The glove box vapor deposition equipment integrates resistance evaporation and organic beam source furnace evaporation, making it a multi-functional vacuum coating equipment. The system can deposit various metal thin films, such as various metals like aluminum, silver, platinum, gold, and cobalt, as well as organic materials such as C60, NPB, and TPBi.

The coating chamber adopts a double-sided opening structure. The front side uses a sliding opening structure that can be seamlessly connected to the glove box for easy operation inside the glove box. The rear side uses a side opening door for easy maintenance and cleaning of the system.

The main system configurations are as follows:

1. Vacuum Chamber (Ultra-high Vacuum Design)

• 304L stainless steel square vacuum chamber, internally electropolished, the vacuum chamber is approximately 400mm wide, 400mm deep and 450mm high, with a vertical front and rear door structure.
• The front door guide rail features a central pull rod design, saving glove box space while maintaining a more aesthetically pleasing appearance. The front door handwheel’s locking design avoids the inconvenience of manual opening and effectively prevents air from leaking into the glove box when opening the rear door. The rear door uses a manual hinge structure, making locking and sealing simple. It is equipped with a DN100 observation window with a baffle.
• The main valve and molecular pump are connected to the left side of the vacuum chamber, along with the vacuum measurement interface. The top is equipped with a rotating and lifting sample stage, a large baffle on the sample stage, and a thermocouple interface for the heater. The base plate houses the evaporation source, film thickness gauge probe interface, and other components. The vacuum chamber door has a 4-inch diameter observation window with a baffle; it is fitted with anti-fouling glass.
• The integrated electrical control unit is located below the equipment and glove box. The system is equipped with casters and feet for easy movement.

1. Vacuum System (Equipment Ultimate Vacuum: 6×10E-5Pa)

• A 1200L molecular pump is used as the main pump, and an 8L rotary vane mechanical pump is used as the pre-stage pump;
• High vacuum valve: pneumatically controlled and integrated into the main control system;
• Roughing valve (DN40, pneumatic)
• Fore-stage valve (FN40, pneumatic)
• Vent valve (DN6, electric)

III. Vacuum Measurement System

1. Evaporation System and Film Thickness Control (Quantity Optional)

• Metal evaporation components;
• Two sets of water-cooled evaporation electrodes, compatible with evaporation boats and spiral evaporation filaments, with pneumatic baffles. Equipped with two sets of digital DC evaporation power supplies;
• Organic evaporation components;
• The system is equipped with two organic evaporation sources, each with an independent power supply and temperature control;
• Film thickness control;
• One quartz crystal film thickness gauge, including one water-cooled probe;

1. Sample Holder System

• The equipment is equipped with a rotating and lifting workpiece tray, which can hold a maximum of one four-inch sample at a time. It features a magnetic fluid seal, motor control, and an electro-pneumatically controlled sample baffle.
• High-torque motor and controller, speed adjustable from 0 to 30 RPM;
• The main control system controls the switch and speed;
• The base distance of the lifting source is adjustable from 150-250mm, controlled by magnetohydrodynamics and stepper motor;
• Includes a mask assembly (specific dimensions to be ordered according to user requirements);

1. Control System

• Manual logic control or touchscreen automatic control;
• Controlled components: mechanical pumps, molecular pumps, pneumatic and solenoid valves, vacuum gauges, etc.;
• Complete interlock protection (hardware and software interlocks) ensures the safety of personnel and equipment by placing the equipment under complete interlock protection. Additionally, the system is equipped with…
• Water flow detection and alarm device;