PECVD Tube Furnace

Product Summary: This equipment consists of a sliding-opening vacuum tube furnace, a gas mixing system, and a vacuum and pressure system. The sintering temperature can reach 1200°C. Rapid heating and cooling are achieved through the sliding furnace body. Ideal vacuum levels can be achieved by configuring different vacuum systems, and different gases can be controlled via multiple high-precision mass flow meters.

Product Introduction

★ Furnace Structure: High-purity alumina polycrystalline fiber cured furnace chamber, vacuum adsorption molding using Japanese technology, offers excellent insulation. Hydraulic dampers are installed at both ends, and the furnace cover can be opened for real-time observation of the heated material.

★ Power Supply: AC220V, 50/60HZ Power: 4KW

★ Furnace Tube: High-purity quartz tube Dimensions: φ 40/60/80/100*1200mm

★ Heating System: Heating zone length 440mm, constant temperature zone length 200mm, operating temperature ≤1150°C, maximum temperature 1200°C, heating rate 10°C/min

★ Temperature Control System: Temperature control utilizes artificial intelligence adjustment technology with PID regulation, self-tuning function, and 30-segment heating and cooling programs.

★ Gas Mixing System: Multi-channel mass flow meter with digital display and automatic gas flow control. Flow rate specifications: 0-1SLM, flow rate accuracy ±1.5%

★Vacuum level: Vacuum level up to (5E-01) torr

★Optional accessories: Gas mixing system, high vacuum system, various corundum and quartz crucibles, quartz tubes, computer control software, oxygen content analyzer, etc.